Applications of silicon pressure sensor:
1. Suitable for measuring the corrosive gas and liquid pressure, compatible with 316 l stainless steel
2. Used in process control systems to monitor and control pressure.
Electrical performance of silicon pressure sensor:
1.Power Supply: ≤10VDC
2.Common Mode Voltage Output: 50% of the input (typical)
3.Input Impedance:4KΩ~20KΩ
4.Output Impedance:2.5KΩ~6KΩ
5.Electrical Connection:100mm high-temperature wire,ribbon cable
| Performance Parameters of silicon pressure sensor:. |
| Measurement Range | Gauge(G) | 10KPa,20KPa,35KPa,100KPa,200KPa,350KPa,1000KPa,2000Kpa |
| Absolute(A) | 100KPaA,200KPaA,350KPaA,700KPaA,1000KPaA,2000KPaA |
| Sealed(S) | 3500KPaS,7MPaS,10MPaS,20MPaS,40MPaS,60MPaS,100MPaS |
| | Typ | Max | Unit |
| NonLinearity | ±0.15 | ±0.3 | %F.S |
| Repeatability | 0.05 | 0.1 | %F.S |
| Hysteresis | 0.05 | 0.1 | %F.S |
| Zero Offset Output | 0±1 | 0±2 | mV |
| Full Scale Output | ≤20KPa | 50±1 | 50±2 | mV | |
| ≥35kPa | 100±1 | 100±2 | mV | |
| Zero Offset Temp. Drift | ≤20KPa | ±1 | ±2.5 | %F.S | |
| ≥35kPa | ±0.8 | ±1.5 | %F.S | |
| Full Scale Temp. Drift | ≤20KPa | ±1 | ±2 | %F.S | |
| ≥35kPa | ±0.8 | ±1.5 | %F.S | |
| Compensated Temp. | ≤20KPa | 0~50 | ºC | |
| ≥35kPa | 0~70 | ºC | |
| Operating Temperature | -20~80 | ºC | |
| Storage Temperature | -40~125 | ºC | |
| Allowable Overload | Take the smaller value between 3 times the full scale or 120MPa | | |
| Burst Pressure | 5X the full scale | | |
| Long-term Stability | 0.2 % | F.S/Year | |
| Diaphragm Material | 316L | | |
| Insulation Resistance | ≥200MΩ 100VDC | | |
| Vibration | No change under conditions of 10gRMS, 20Hz to 2000Hz | | |
| Shock | 100g,11ms | | |
| Response Time | ≤1ms | | |
| O-ring Seal | Nitrile rubber or Fluoro rubber | | |
| Filling Medium | Silicon Oil | | |
| Weight | ~28g | | |
| The parameters are tested under the following conditions: 10V @ 25ºC | |
| Outline Construction of silicon pressure sensor |
| <3.5MPaS |  |
≥3.5MPaS
<40MPaS |  |
| ≥40MPaS |  |
| Electrical connection and compensation of silicon pressure sensor |
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